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JUSUNG to supply MRAM etching equipment to Crocus

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JUSUNG Engineering, a supplier of tools for semiconductor, display and solar cell equipment, is to supply an integrated etch and deposition system for advanced MRAM technology to Crocus Nano Electronics (CNE).

Russian Based CNE is a joint venture founded by Crocus Technology, an MRAM semiconductor developer, and RUSNANO, a Russian state-owned international investment company.

The supply agreement has a significant meaning to JUSUNG's global expansion strategy as the process technology was validated by Crocus Technology in the USA.

The Genaon Plus MRAM etching equipment to be supplied by JUSUNG is a core process tool that can etch non-volatile materials such as platinum, manganese and cobalt.



Genaon - Dry Etcher (Poly Etch) tool

Conventional process tools cannot process such new materials that are used in advanced memory devices, making JUSUNG's Genaon Plus a unique enabling technology.

According to JUSUNG, the plasma etching equipment specialized for magnetic metal layers patterning, one of the most critical in MRAM processes, can completely eliminate polymer residue left behind on the side walls during the etching process, thereby enabling chip designers to utilise a variety of new materials.

 As a low-power, high-density memory chip that combines storage capacity of flash memory and high speed of DRAM, MRAM is emerging as a next-generation memory. The MRAM market is engaging rapidly and is expected to grow to 925 billion Korean Won in 2018 globally. JUSUNG is excited to participate at the early stage of such a high growth market.

CJ Hwang, CEO of JUSUNG, comments, "We identified Crocus Technology as an ideal partner to launch our next-generation equipment. Crocus is an industry leader in the emerging market. While this is a new partnership for JUSUNG, our goal is unchanged to develop innovative technologies to delight our customers."

Boris Omarov, CEO of CROCUS NANO ELECTRONICS, adds, "We made the critical decision for CNE because Jusung is the leader in Magnetic Etch Technology. Jusung is the perfect partner for CNE and Russia, since they all share the same spirit of pacesetting and dedication to perfection."

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