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Iris AO uses MEMS technology for exceptional deformable mirrors

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Iris AO has developed patented MEMS technology to manufacture deformable mirrors. These mirrors range from 100 to 500 actuators with inscribed aperture from 3.5 mm to 7.7 mm.

They consist of up to 163 high-quality single-crystal silicon segments. Each segment can be positioned by three actuators. Because the quality of the individual segments is so good, the gaps between the segments are small. What's more, the calibrations are so accurate, researchers have been able to show that the Iris AO deformable mirror (D) performs on par with other continuous mirrors but with huge advantages regarding the surface deformation.

A further key advantage is the wide range of optical HR coatings that can be combined with the segments. This opens DMs up to a large number of applications. Initial testing has shown that the deformable mirrors are capable of 300 W/cm2 average power handling without heat sinking and 3 kW/cm2 with heat sinking. Other tests have demonstrated peak power handling in excess of 130 MW/cm2 (4 mJ/pulse) for pulsed applications

Advantages at a glance:

    111 or 489 actuator deformable mirrors with independently controlled high-quality single-crystal silicon segments

    Factory calibrated mirror positioning "“ use it out of the box

    Optional dielectric coating for fs and high-power lasers

    Up to 10 kHz update rates

    Deliverable as complete AO system including a matched Shack-Hartmann sensor

The applications for deformable mirrors are growing steadily. Laser 2000 and Iris AO are actively developing DMs to meet the needs of new applications.

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