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Mattson ships new etch systems to DRAM manufacturer

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Mattson Technology, a supplier of advanced process equipment for the manufacture of semiconductors, has announced that its new paradigmE XP etch system has been qualified for advanced DRAM device technologies.

In order to support customer requirements, the paradigmE XP system was qualified for production use and additional systems were manufactured, shipped and installed at a customer wafer fabrication facility within the same quarter, demonstrating Mattson's technical and operational agility to support the growing demands for its products.

"Our customer selected the paradigmE XP system based on meeting their stringent device technology requirements while achieving competitive cost of ownership. These results were achieved with our most advanced, proprietary, plasma source, which we believe offers process performance comparable to the industry's leading edge offerings," says Rene George, Vice President and General Manager of Mattson Technology's Plasma Products Group.

"After a rapid and intense qualification, we have installed multiple systems to support wafer fab mass production. We continue to develop additional process applications on the paradigmE XP to offer the advantages of our state of the art technology and industry leading productivity to not only our memory customers, but our foundry and logic customers as well," George adds.

In describing the impact of this performance on the company, President and CEO Fusen Chen says, "Mattson has demonstrated its ability to respond quickly to customer requirements and capture new market opportunities. Current engagements in similar projects across all of our product lines are expected to enable us to continue our profitable growth through the current cycle."

Mattson Technology, Inc. designs, manufactures and markets semiconductor wafer processing equipment used in the fabrication of integrated circuits. The firm supplies plasma and rapid thermal processing equipment to the global semiconductor industry, and operate in three primary product sectors: Dry Strip, Etch, Rapid Thermal Processing and Millisecond Anneal.

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