Levitech BV receives repeat order for RTP system
The Netherlands based firm has received the order from a major European chip maker. This firm will use the tool for the high-volume manufacturing of semiconductor devices for the automotive and industrial sectors
Levitech BV has shipped a Levitor RTP system to one of Europe's largest chip makers and received a repeat order for delivery of another system early next year.
"The Levitor was again selected by this leading semiconductor manufacturer for high-volume manufacturing of semiconductor devices for automotive and industrial sectors," says Jaap Beijersbergen, CEO of Levitech.
"This client chose our Levitor RTP system based on its significant productivity, cost-of-ownership and process advantages over competitive systems for RTP applications," Beijersbergen concludes.
The Levitor's unique emissivity independent process - through conductive heating and cooling - helps any client to address current and future technology needs.
The Levitor is a single-wafer RTP system based on a unique conductive heating and cooling technology. What differentiates this system from the rest of the market is its superior process performance, flexibility, cost-of-ownership and process extendibility.
In the Levitor, the wafer floats on a very thin cushion of gas between two blocks. The gas layer between the wafer surface and the reactor blocks enables ultra-fast heating or cooling, while also self-centering the wafer and keeping it suspended at the desired process temperature. The result is very precise heat transfer that is emissivity independent - totally insensitive to the type of film on the wafer.
Levitech is a global player in production solutions for the IC and photovoltaic industries. A spin-off of ASM International, Levitech was established in 2009 around its core product, the Levitor system. This system is based on a patented technology and used in the semiconductor industry for Rapid Thermal Processing (RTP).
The Levitor 4300 and Levitor 4200 are 300mm and 200mm tools for advanced RTP processes in high volume. The Levitrack ALD system is a state-of-the-art production solution for the solar industry and is based on the innovative concept of precursor separation in space, instead of time, in combination with the unique floating wafer and conductive heating technology used in the Levitor RTP products.
