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Mattson etch system qualified for NAND devices

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The paradigmE XP system has been designed to meet the demands of advanced semiconductor technologies. It is focused on semi-critical applications for next generation 3-D devices and memories such as NAND and DRAM

Mattson Technology says its paradigmE XP system has been qualified by a major semiconductor manufacturer, establishing a strong market position for etch products in the growing NAND memory market.

Additional orders for the paradigmE XP will be shipped over the next two quarters to support production ramps of advanced NAND devices.

The latest addition to Mattson's etch product family, the builds upon the success of the paradigmE and extends its etch technology. The tool enables chipmakers to address processing challenges for leading-edge, three-dimensional semiconductor manufacturing.

The paradigmE XP features a unique technological advance in inductively coupled plasma systems. In a dual-wafer vacuum chamber, Mattson's proprietary dual-zone RF source design provides cutting-edge process capability rivaling that of single-wafer vacuum chamber tools. This innovative plasma source provides radially controllable etch uniformity and a wide process window.

Mattson's paradigmE XP's chamber design features patented wafer area isolation, to provide wafer-to-wafer matching results meeting those of single-wafer vacuum chamber tools.

The tool also features true dual-zone gas distribution further controlling process uniformity performance across the wafer surface. The system offers a process portfolio focused on semi-critical applications for next generation, three-dimensional semiconductor technologies at memory and foundry / logic manufacturers.

"The paradigmE XP not only offers next-generation capability, with excellent process performance, but it also provides proven production worthiness built on our established high-throughput platform," says Rene George, vice president and general manager of Mattson Technology's Plasma Products Group.

"This latest addition to our etch product family is expected to expand our presence in the etch market and contribute to Mattson's continued growth through the current business cycle. We are excited to continue innovating true value solutions that deliver the advanced technology and low cost-of-ownership our customers require to maintain competitiveness as they ramp production of next-generation integrated circuits," concludes George.

 

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