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News Article

"˜MEMS and NEMS processing advances' workshop

News

Oxford Instruments is to host an interactive, one day technical seminar focused on practical applications, techniques and advances in NEMS and MEMS semiconductor technology.

The event will take place at IEMN, Lille, France on 8th April 2014.

Speakers from KAUST, Yole and Eindhoven will present at the workshop. This event is being hosted in conjunction with the Institute of Electronics Micro-electronics and Nanotechnology (IEMN) in Lille.

The workshop is aimed at all those scientists working in research and manufacturing with an interest in MEMS and NEMS, and is designed to inform participants of latest technologies and trends in these hot industry research topics.

Talks will include topics such as:    
MEMS - how to make the nanoworld smaller
   
Nanoscale etch
   
MEMS research applications and results - IEMN
   
Looking towards the next generation of MEMS devices - Yole
   
ALD for MEMS - Eindhoven University
   
ALD research and results - KAUST, Saudi Arabia
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