Mattson ships multiple Millios systems in Q1
The tools will be used for the volume production of advanced foundry/logic devices
Mattson Technology, a supplier of advanced process equipment used to manufacture semiconductors, has announced that additional Millios millisecond anneal (MSA) systems were shipped in the first quarter to multiple wafer fabrication facilities.
"Shortly after its selection as a production tool of record for volume manufacturing, additional Millios capacity was requested by our customer to meet their wafer start capacity requirements," says Johannes Keppler, Vice President and General Manager of Mattson Technology's Thermal Products Group.
"In anticipation of the Millios' success, operational plans were already in place to enable Mattson to quickly respond to additional system requests and deliver multiple Millios systems on a schedule to meet the customer's requirements."
"The Millios provides superior enabling technology that will drive volume production of advanced semiconductor devices at the 20nm technology node and beyond," adds Hoang H. Hoang, SVP of Global Business Operations. "The Millios, which is qualified for multiple applications, will play a critical role in driving Mattson's continued success. With positions in advanced logic production now established for both the Millios and our Helios XP, Mattson is poised to achieve industry leadership in the Rapid Thermal Processing segment."
