Mega Fluid Systems Celebrate Major Tool Shipment to USA Foundry
Mega Fluid Systems Inc., a supplier of chemical and slurry delivery equipment, has announced completion of a major tool shipment and installation at a leading U.S.based foundry.
Under the terms of the agreement, Mega designed a slurry/chemical blending and delivery system to be used specifically for supplying dynamic chemistries for CMP polishing applications. Mega's system was chosen because it can be tailored to handle the customer's specific chemistries without affecting their properties, designed to improve process results and lower cost of ownership.
"This customer's specific process is relatively complex, which called for a highly customized solution," said Delton Hyatt, president of Mega Fluid Systems. "We have supplied this customer for over 15 years, which shows us that our tools are providing the reliability and cutting edge technology advantages that are so important in this highly competitive industry. The customer's understanding of our technology and familiarity with our systems certainly contributed to this order."
Mega Fluid Systems design and manufacture slurry and chemical delivery systems. The design of the shipped tool was based on a Mega system currently in use by the customer's parent company. Using that as a starting point, Mega aligned the processes then it customized certain components of the application in order to meet specific operating requirements. The tool employs an independent two-station process designed to blend and dispense chemistries to a single global loop.
