Spintrac delivers new 450mm photoresist tool to Noel
Silicon Valley based Spintrac Systems has released its Tractrix-450 Coat-Bake system.
This system is designed to support the growing R&D market for processing 450mm semiconductor wafers.
According to Alan Kukas, president of Spintrac Systems, the first system has been shipped and installed at Noel Technologies in Campbell, California.
Due to Noel's expanding customer demand, the system delivered to Noel can also accommodate coating, baking and chilling 300mm wafers with a proprietary indexer that accommodates a 300mm FOUP cassette.
The Tractrix-450 tool comes equipped with:
A custom 450mm loading platform for single wafer processing
Automated transfer of the wafer through predefined process flows
Windows OS user interface for login and creating process programs
Much of the technology has been adapted from the production Tractrix system released over a decade ago.
Leon Pearce, President of Noel Technologies, says the firm will now be able to add coated 450mm wafers to the process services it offers. The specialty foundry first offered process development for 450mm wafers in wet processes, etches, and wafer cleaning in 2013.
Spintrac Systems Inc. produces track systems for coating, baking, and developing that are used in R&D labs and production fabs. The company's processing systems were initially targeted towards silicon wafers but now extend into compound semiconductors, sapphire, glass and ceramic varying in size from 2" to 320mm x 380mm plates to 450mm.
