Integrated Sub-fab Systems from Edwards
Integration of sub-fab components into a single unit, with a single controller, provides numerous benefits: better process reliability, safer operation, faster start-up, and reduced total cost-of-ownership. An integrated system supplier is able to define and control the best possible set-up of vacuum pumps, abatement system, exhaust pipe configuration and pipe temperature management to provide reliable and predictable performance. Edwards' EZENITH system, for example, reduces footprint by 30 percent and exhaust pipe lengths by up to 60 percent, compared to the size and cost of separate pump and abatement systems, significantly reducing operating costs for semiconductor manufacturers. Installation for the EZENITH is also 60 percent faster, due primarily to the reduction by half of required utility connections; and simplified service of the integrated system further reduces the overall cost of ownership. To optimize performance and efficiency, each EZENITH installation is customized to meet the customer's process-specific pumping and abatement requirements. Customization of the EZENITH has been key to its wide-spread adoption "“ Edwards announced the 1,000th milestone shipment of the EZENITH in 2014.
Edwards Turbo Pumps
Edwards' STP-iXA4506 large-capacity turbomolecular pump (TMP) is designed to deliver significant savings for cost-sensitive manufacturers of semiconductors, flat panel displays, LEDs and solar panels. The pump's high speed (4300 l/s N2) and throughput (up to 4300 sccm N2), combined with its ability to efficiently pump both light and heavy gases, make the STP-iXA4506 ideal for a wide range of large-volume, high-flow applications, including semiconductor etch, LCD etch, glass coating, solar PVD and coating PVD. Its tightly-integrated design includes a completely sealed electronic module for robust, reliable operation in the most demanding factory environments. When needed, a thermal management system can be added to reduce the accumulation of deposits and particulates from process byproducts.
iXH Dry Pumps from Edwards
Both LED and compound semiconductor manufacturing processes typically use high flows of light hydrogen and highly-corrosive ammonia gasses. The iXH645H has been optimized to support these requirements with superior hydrogen pumping performance and a corrosion-resistant design, including a patented nitrogen purge barrier to protect the pump seals. The high-temperature capabilities of the pump help prevent condensation of the phosphorous compounds which may be present. In addition, its advanced oil lubrication and seal technology eliminate periodic maintenance requirements, while its thermal and motor design prevent overheating, motor overloads or zones of limited operation. The pump's optimized temperature control system ensures the pump is ready for process within approximately 30 minutes of start-up.
