TMC introduces stage-base 450 with voice coil technology
TMC, a developer of high-performance vibration and motion cancellation technology, has introduced Stage-Base 450, its next generation of frame-mountable, active vibration and motion cancellation systems designed to control building floor vibration in semiconductor facilities, while increasing wafer-processing throughput.
TMC says it is the first and only solutions provider to integrate unique serial-type architecture with voice coil technology into a system for aggressive moving-stage motion cancellation. Its Stage-Base 450 system is specifically designed to be the primary vibration cancellation system for semiconductor tools that incorporate high-precision motorized X-Y stages.
While such tools require extremely efficient vibration isolation, they just as critically require that payload motion induced by the moving stage settle very quickly to maximize tool throughput. By adding voice coil motor technology to TMC's highly advanced STACIS system, Stage-Base 450 (patent pending) provides a 4x improvement in settling time over TMC's previous generation STACIS iX Stage-Base.
"TMC continues to apply the latest technological advances in developing new solutions for the challenging demands that semiconductor tools place on their vibration isolation systems. Stage-Base 450, with STACIS inside, is truly unique in our industry," states Wes Wigglesworth, TMC Product Manager, Active Systems.
"This is the only commercial solution that provides active floor vibration cancellation starting at 0.6Hz increasing to a 10-to-1 reduction by 2Hz with voice coil technology in a compact, reliable system to dramatically reduce the impact of stage motion on wafer processing," he adds.
Like its predecessor, Stage-Base 450 incorporates TMC's unique STACIS technology. The serial-type architecture of STACIS allows TMC to use a very stiff spring to support the payload. This is very desirable due to the much lower initial deflection in response to stage forces compared to softer springs. The proven piezoelectric active cancellation technology in STACIS delivers vibration cancellation starting at the lowest frequency commercially available.
With the addition of optional voice coil motors with feed-forward control for even faster settling time, Stage-Base 450 is the most advanced active vibration- and motion-cancellation system available for tools with moving stages.
