Gigaphoton Ships Its Newest GT64A4 ArF Excimer Laser
An important feature of the GT64A4 is its open platform, capable of supporting many kinds of collaborative development efforts. It allows laser data to be easily shared and utilized by customers and partners in cooperation with Gigaphoton to develop new technologies for reducing operational costs and environmental impact. For example, a joint-development project is already underway to further reduce the gas consumption by another 50 percent. The GT64A4 is designed to be scalable to facilitate the incorporation of new technologies and features as they become available. Customers can continuously upgrade, which enables the ability to use the laser for many years to come.
The GT64A4 is also equipped with many of the features developed under Gigaphoton's long-standing EcoPhoton program, including environmental and cost-friendly gas/electricity reduction technologies such as eTGM and eGRYCOS, which enables an annual operating cost savings of up to 35 percent compared to previous models. It is also equipped with a new spectrum control technology capable of achieving incredibly high spectral beam stabilization to within ±5 fm (femtometers)─offering huge benefits for critical dimension (CD) stability across wafers.
"All of Gigaphoton's strength in green technologies is concentrated into the GT64A4," said Hitoshi Tomaru, President and CEO of Gigaphoton. "It's open innovation platform design will help to further accelerate the evolution of these technologies. The shipment of this laser is a huge milestone for Gigaphoton. Our GT64A4 laser will be used as a basis for cooperating with customers and partners to continue to develop and introduce new innovations that help optimize semiconductor factories to become more efficient and green."
