Multiple foundries in Asia select Jordan Valley's X-ray metrology tool
Jordan Valley (JV), a supplier of X-ray based in-line metrology solutions for advanced semiconductor manufacturers, has announced that it has received orders for its latest generation JVX7300HR front-end-of-line (FEOL) strain & thin-film metrology tool from multiple foundries in Asia.
The innovative JVX7300HR tool provides in-line, first principle metrology for product-wafers at the 28 nm, and below, technology nodes. The high-resolution X-ray diffraction (HRXRD) measurement channel provides a unique monitoring capability for epitaxial materials, such as SiGe, Si:C, Si:P, providing information on strain and epitaxial quality on both bulk Si and (FD)SOI substrates. Additionally, the X-ray reflectivity (XRR) channel provides thin-film thickness monitoring for complex stacking including high-k / metal gate (HKMG) stack analysis
Dr. Alex Tokar, JV's worldwide applications manager explained that JVX7300HR was developed with the unique challenges that the advanced technology nodes pose. The tool provides superior performance to its competitors for complex multi-layer epi and HKMG stacks. High-throughput X-ray metrology provides unique capabilities compared to traditional optical techniques with improved productivity and hence reduced CoO. The JVX7300HR provides advanced capabilities such as reciprocal space maps (RSMs) on product wafers for development and production ramp and hybrid metrology support.
Isaac Mazor, JV's CEO added: "Our unique Fast HRXRD and XRR technologies have been proven to be crucial for process ramp-up and in-line metrology, especially for epi. quality monitoring. The JVX7300HR was designed based on our experience gained working in the fabs of the leading logic players. Our existing customers appreciate our experience in providing unique X-ray based metrology solutions. Our customers benefit from the JVX7300 from faster process ramp-up and control with a lower cost of measurement."
About the JVX7300HR production metrology tool
The JVX7300HR is a production worthy X-ray metrology tool combining XRR and HRXRD channels. The tool targets FEOL applications for the 28nm technology node and below. The JVX7300HR supersedes the JVX7200HR (Best-of-West 2010 award winner)
