New High-Purity Circulation Heater for Semiconductor Market
Cast Aluminum Solutions (CAS), has announced the launch of the new PUR-X line of circulation heaters. PUR-X features a replaceable fluid tube on a spiral-grooved cast aluminum body, a feature not found on any other circulation heater. This unique design helps ensure contamination-free heating.
PUR-X is available in two sizes; the PUR-X 1000 and PUR-X 2000. Capable of heating liquids or gases, both models feature a replaceable fluid tube made of PFA (Perfluoroalkoxy), a polymer capable of withstanding temperatures to 500°F (260°C). PUR-X circulation heaters also feature a Teflon®"“coated aluminum body, the Teflon protecting the heater body from chemical damage and enabling easy cleanup.
According to Tony Meadors, Vice President of Sales for the Semiconductor Industry at CAS, "the PUR-X line has been designed to fit into applications where heated fluids must remain ultra-pure and contamination-free. This includes heating of DI water, heating of photo-resist removal solvents, and wet bench applications for wafer cleaning "“ but because PUR-X can also heat gases, it can be used in wafer drying applications to heat nitrogen or air."
Cast Aluminum Solutions offers a range of heat transfer products to the semiconductor industry, including chamber heaters, custom heater assemblies, heated platens & pedestals for wafer processing, and the CAST-X line of circulation heaters.
PUR-X circulation heaters will be available worldwide through CAS's team of application engineers and distributors.
To accommodate the full array of global heating demands, PUR-X is available in a wide range of volt and watt options. These units are also equipped with explosion-proof electrical enclosures, for deployment in hazardous environments.
Eric Hostert, Director of Engineering at Cast Aluminum Solutions, summarized the PUR-X development approach,
"At CAS, we work closely with customers, almost as an extension to their engineering team, so we designed PUR-X based on real-world demands. If the PUR-X flowpath tube contacts any unwanted particulate matter or residue, it can be easily replaced with a new tube. It takes 10 minutes. This saves time and money. For a contamination-sensitive industry like semiconductor, we're anticipating PUR-X to be a very desirable component."
The PUR-X line of circulation heaters is manufactured by Cast Aluminum Solutions, headquartered in Batavia, Illinois.
