Servomex and GAS (Ireland) Partner to Deliver System Solution for Semiconductor Manufacturer
Servomex, has worked in partnership with Gas Analysis Services (GAS) of Bray, Co. Wicklow, Ireland to deliver a complete ultra-trace analysis solution for one of Ireland's major semiconductor manufacturing plants.
Required to ensure exceptional purity levels are maintained in Ultra High Purity (UHP) bulk gases used in inert atmospheres critical to the manufacturing process, the customer required a solution able to measure ultra-trace oxygen (O2) and moisture in nitrogen, argon, hydrogen, and trace moisture only in oxygen. Working closely together, Servomex and GAS were responsible for the consultation, design, delivery and implementation of a complete integrated system based around the use of three Servomex DF-760E dual O2/Moisture and one Servomex DF-750 Moisture ultra-trace analyzer.
Designed for the precise measurement of impurities in UHP gases, DF-760E analyzers utilize Servomex's non-depleting Coulometric and TDL Laser Moisture sensing technologies to enable the simultaneous measurement of ultra-trace O2 and moisture respectively. This unique combination provides an optimum solution with exceptionally low, industry-leading Lower Detection Limit (LDL) of 100ppt (H2O) / 45ppt (O2). The DF-760E provides fast speed of response, unsurpassed stability and immunity from trace acid damage - ideal for quality checking and leak detection across all areas of semiconductor fabrication manufacture, and ideal for the customer's requirements.
An efficient system design was critical, with the optimum integration of sample, calibration, purge and actuation gases with HP Regulators and associated VCR fittings crucial to the success of the project. Servomex's expert Systems team not only provided a comprehensive drawing package and technical specification, but worked with GAS at all stages of the project to supply technical support and maintain all project timeline deliverables.
Once the system was manufactured, Servomex Field Service Engineer Lee Spencer was able to resolve any issues onsite - resulting in flawless installation "“ while Trace Gas Moisture Product Specialist Phil Rogers was able to use his expertise in DF products to add technical support.
Ruairi Donegan, Instrument and Applications Engineer at GAS in Ireland, said:"Servomex expedited this project very effectively and efficiently from all of the various facilities within the company. All aspects of the project timeline deliverables were met and all departments provided excellent technical capability and information. The support provided by Servomex across all aspects of the project was invaluable, anticipating customer questions and enabling us to answer them comprehensively. The project package overall was very professional and the customer is extremely satisfied with the results - and would select Servomex again for the above reasons."
Servomex continues to work closely with GAS on the installation, assessing and implementing site-specific technical improvements where required.
