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Dryvac Systems for Thin Film Coating Processes

Oerlikon Leybold Vacuum has introduced a broad line of vacuum pump systems and accessories specifically optimized for thin film coating processes such as flat panel display applications. At the Semicon Korea, 27. "“ 29. January, Oerlikon Leybold Vacuum invites customers to learn more about these new innovative DRYVAC SYSTEMS. Delivering highest throughput with best cost of ownership (CoO) is our mission. This is achieved by highly efficient pumping mechanisms in combination with energy saving options e.g. operating modes.

Oerlikon Leybold Vacuum leads the way in the development of complete vacuum solutions for all coating applications. The company's expertise is unequalled in understanding the technical requirements and support needs of your business.

The result is an optimized range of standard components featuring compact designs, supreme technical standards and outstanding reliability. The compact and smart vacuum solutions consist of high vacuum, booster / dry pump combinations, as well as control devices, if required.

Standardized Systems based on DRYVAC dry screw pumps in combination with roots blowers from the RUVAC WH family are the optimal solution for flat panel display application like fast load lock, transfer and deposition processes. They offer the fastest pump down times with the highest pumping speeds in their class. By standardization, Oerlikon Leybold Vacuum achieves highest user friendliness of the offered system. The major customer benefits are standardized interfaces such as electrical connections, purge options and/or cooling water, paired with easy maintenance access and a very convenient backup pool handling.

Major processes in which these systems excel:

- Load Lock / Transfer

- Transistor Sputter TSPT / Color Filter Sputter FSPT / Cell

- OLED Encapsulation / Evaporation / 

- Transistor TFT-PECVD / Thin Film Encapsulation TFE-PECVD

- VCD Photoresist coater



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