Parker Introduces New Pressure-Reducing Regulators
The Veriflo Division of Parker Hannifin Corporation has introduced the Parker FR 1000 and FR 1400 Series of ultra-high purity regulators for semiconductor fabrication gas handling. Designed specifically for valve manifold boxes, point-of-use tool hook-up and gas cabinet applications, FR 1000 and FR 1400 Series regulators provide precise, stable control of process gases in downstream point-of-use applications, reducing short- and long-term costs for semiconductor OEMs, integrators, and fab facilities.
As the primary supplier of ultra-high purity (UHP) regulators and valves for leading semiconductor tool manufacturers for over 25 years, the Parker Veriflo Division has brought its expertise and performance quality standards to bear on the FR Series. The new FR series will complement Parker Veriflo's existing lines of regulators.
The Parker FR 1000 Series of new, low-cost regulators feature:
"¢ Low flow capacity with 0.09 Cv and 0.15 Cv versions with single-melt 316L stainless steel or double-melt 316L stainless steel bodies
"¢ A Hastelloy C-22 diaphragm "“ standard on all models "“ to provide increased cycle life and corrosion resistance
"¢ Metal-to-metal seals "“ standard on all models to provide enhanced leak integrity
"¢ Integrated Hastelloy filter "“ standard on all models "“ to protect the regulator's performance over time
"¢ A sealed cap and captured bonnet port "“ standard on double-melt 316L stainless steel models of the regulator for safe evacuation of gases in instances of diaphragm breach with toxic gases
The Parker FR 1400 Series of new, low cost regulators feature:
"¢ Tied diaphragm design with 0.5 Cv high flow capacity with single-melt 316L stainless steel or double-melt 316L stainless steel bodies
"¢ A Hastelloy C-22 diaphragm and poppet "“ standard on all models "“ to provide increased cycle life and corrosion resistance
"¢ Metal-to-metal seals "“ standard on all models to provide enhanced leak integrity
"¢ Low inlet pressure (300 psig) and high inlet pressure (3000 psig) models available for improved pressure regulation
According to Mark Heffel, Marketing Manager, Ultra High Purity, the new regulators are just one of several reasons to do business with Parker. "Yes, our new Parker FR Series Regulators are competitively priced but still deliver high performance and key features such as a standard Hastelloy diaphragm and filter and a metal-to-metal seal that is not usually found in other regulators at competitive price points in the market, but they're just part of the Parker package," Heffel said. "With more stainless steel and fluoropolymer fittings, valves, regulators and manifolds than any other supplier, Parker can offer the integrated solutions that work together seamlessly to increase throughput, ensure media purity, and reduce expensive downtime."
