+44 (0)24 7671 8970
More publications     •     Advertise with us     •     Contact us
 
News Article

Applied Materials announce extreme selectivity etch tool



Applied Producer Selectra system

Applied Materials claims it is revolutionizing etch technology with its Applied Producer Selectra system, the industry's first extreme selectivity etch tool that introduces new materials engineering capabilities for continued scaling of 3D logic and memory chips.

"One of the most significant hurdles in producing advanced chips is to selectively remove a specific material without damaging other exposed materials in the multi-layer device," said Dr. Shankar Venkataraman, vice president and general manager of Applied's Selective Removal Products Business Unit. "The Selectra system is the latest innovation in our etch portfolio of differentiated products, and creates new market opportunities by delivering the extreme selectivity required to advance Moore's Law."

Advanced microchips featuring increasingly complex structures and deep, narrow trenches are creating new manufacturing challenges. One of these challenges is the inability of wet chemistry to penetrate tiny structures; another is the removal of unwanted materials without causing damage. The Selectra system's breakthrough process accesses the smallest spaces, delivering unprecedented materials selectivity and atomic-level etch precision for a wide variety of dielectric, metal and semiconductor films. Its extensive range of processes and ability to achieve precisely controlled residue- and damage-free materials removal targets an expanding number of crucial etch applications for patterning, logic, foundry, 3D NAND and DRAM. The system's versatility allows chipmakers to manufacture leading-edge 3D devices and to explore new architectures, materials and integration options.

Selectra systems are in volume production at foundry, logic and memory chipmakers, and demand is gaining momentum as customers begin to manufacture their most advanced device designs.

Purdue, imec, Indiana announce partnership
Resilinc partners with SEMI on supply chain resilience
NIO and NXP collaborate on 4D imaging radar deployment
Panasonic Industry digitally transforms with Blue Yonder
Global semiconductor sales decrease 8.7%
MIT engineers “grow” atomically thin transistors on top of computer chips
Keysight joins TSMC Open Innovation Platform 3DFabric Alliance
Leti Innovation Days to explore microelectronics’ transformational role
Quantum expansion
indie launches 'breakthrough' 120 GHz radar transceiver
Wafer fab equipment - facing uncertain times?
Renesas expands focus on India
Neuralink selects Takano Wafer Particle Measurement System
Micron reveals committee members
Avoiding unscheduled downtime in with Preventive Vacuum Service
NFC chip market size to surpass US$ 7.6 billion
Fujifilm breaks ground on new €30 million European expansion
Fraunhofer IIS/EAS selects Achronix embedded FPGAs
Siemens announces certifications for TSMC’s latest processes
EU Chips Act triggers further €7.4bn investment
ASE recognised for excellence by Texas Instruments
Atomera signs license agreement with STMicroelectronics
Gartner forecasts worldwide semiconductor revenue to decline 11% in 2023
CHIPS for America outlines vision for the National Semiconductor Technology Center
TSMC showcases new technology developments
Alphawave Semi showcases 3nm connectivity solutions
Greene Tweed to open new facility in Korea
Infineon enables next-generation automotive E/E architectures
Global AFM market to reach $861.5 million
Cepton expands proprietary chipset
Semtech adds two industry veterans to board of directors
Specialty gas expansion
×
Search the news archive

To close this popup you can press escape or click the close icon.
Logo
×
Logo
×
Register - Step 1

You may choose to subscribe to the Silicon Semiconductor Magazine, the Silicon Semiconductor Newsletter, or both. You may also request additional information if required, before submitting your application.


Please subscribe me to:

 

You chose the industry type of "Other"

Please enter the industry that you work in:
Please enter the industry that you work in: