VIDEO
Imec investigates the scope for sustainability improvements
Video Summary
Emily Gallagher, Program Director, SSTS, imec, discusses levers to reduce the CO2 equivalent footprint of lithography and etch for advanced technology nodes. Emily covers process simplification, dose reduction, improved material stacks for etching, and recipe optimization as well as offering more general insights into how the industry can work towards a net zero future.
This video is part of a collection: SiS Issue 4 - Part 1
