VIDEO
Particle accelerator technology promises exciting future for lithography
Video Summary
Jerome Paye, CEO of TAU Systems, outlines how the company’s compact free-electron laser technology addresses the semiconductor industry's most pressing bottleneck, manufacturing ever smaller, more complex chips at a faster rate than currently possible. TAU Systems’ solution exploits laser wakefield acceleration to create compact free-electron lasers that are an order of magnitude cheaper to build and operate than current EUV light sources, whilst delivering brighter light output and shorter wavelengths which means more detailed wafers are possible.
