VIDEO
10x Smaller, 2x Faster: The Breakthrough Behind MTR™ EUV Resist
Video Summary
Dinesh Bettadapur, CEO of Irresistible Materials (IM), explains how the company’s Multi-Trigger Resist (MTR™) platform provides a unique formulation that enables distinct advantages and cost savings over legacy and current resist materials in use for EUV. The MTR material is a small-molecule design, which is 10 times smaller than conventional polymers and is designed to enable superior resolution and pattern fidelity. The MTR chemistry mechanism reduces blurring and improves line-edge and line-width roughness (LER/LWR) for improved yield and is said to be up to two times faster than conventional resists for significantly lower CoO.
